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3D angular luminance uniformity
The function of the specifications is to establish desired standards of quality
Perfluoromethylether-based Perfluoro-alkoxy (MFA) and powders of polytetrafluoro-ethylene (PTFE)
SEMI C28-0301 (technical revision)
E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-0714 - Superseded 3D angular luminance uniformityNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)
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